Meeting at GIGAPHOTON site in Oyama-shi, Japan

Meeting /

In October 2019, the core institutes of the Fraunhofer Cluster of Excellence Advanced Photon Sources CAPS visited the Japanese laser manufacturer GIGAPHOTON Inc. at their site in Oyama-shi, Japan.

GIGAPHOTON develops, manufactures and sales excimer laser used for lithography tools in semiconductor manufacturing and for other uses, and EUV light sources.